Matches in Library of Congress for { <http://lccn.loc.gov/95070375> ?p ?o. }
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- 95070375 contributor B7506763.
- 95070375 contributor B7506764.
- 95070375 created "c1995.".
- 95070375 date "1995".
- 95070375 date "c1995.".
- 95070375 dateCopyrighted "c1995.".
- 95070375 description "Includes bibliographic references and author index.".
- 95070375 extent "ix, 246 p. :".
- 95070375 identifier "0819420069".
- 95070375 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2640".
- 95070375 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2640.".
- 95070375 issued "1995".
- 95070375 issued "c1995.".
- 95070375 language "eng".
- 95070375 publisher "Bellingham, Wash., USA : SPIE,".
- 95070375 subject "621.3815/2 21".
- 95070375 subject "Measurement Congresses.".
- 95070375 subject "Microlithography Congresses.".
- 95070375 subject "Micromachining Congresses.".
- 95070375 subject "TJ1191.5 .M525 1995".
- 95070375 title "Microlithography and metrology in micromachining : 23-24 October, 1995, Austin, Texas / Michael T. Postek, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering.".
- 95070375 type "text".