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- 95070380 contributor B7506773.
- 95070380 contributor B7506774.
- 95070380 created "c1995.".
- 95070380 date "1995".
- 95070380 date "c1995.".
- 95070380 dateCopyrighted "c1995.".
- 95070380 description "Includes bibliographic references and author index.".
- 95070380 extent "vii, 238 p. :".
- 95070380 identifier "0819420034".
- 95070380 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2637".
- 95070380 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2637.".
- 95070380 issued "1995".
- 95070380 issued "c1995.".
- 95070380 language "eng".
- 95070380 publisher "Bellingham, Wash. : SPIE,".
- 95070380 subject "621.3815 21".
- 95070380 subject "Integrated circuits Design and construction Congresses.".
- 95070380 subject "Integrated circuits industry Congresses.".
- 95070380 subject "Manufacturing processes Congresses.".
- 95070380 subject "Metallizing Congresses.".
- 95070380 subject "Plasma etching Congresses.".
- 95070380 subject "TK7836 .P73 1995".
- 95070380 title "Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas / Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.".
- 95070380 type "text".