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- 95070381 contributor B7506775.
- 95070381 contributor B7506776.
- 95070381 created "c1995.".
- 95070381 date "1995".
- 95070381 date "c1995.".
- 95070381 dateCopyrighted "c1995.".
- 95070381 description "Includes bibliographical references and index.".
- 95070381 extent "ix, 302 p. :".
- 95070381 identifier "0819420042".
- 95070381 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2638".
- 95070381 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2638.".
- 95070381 issued "1995".
- 95070381 issued "c1995.".
- 95070381 language "eng".
- 95070381 publisher "Bellingham, Wash. : SPIE,".
- 95070381 subject "621.3815/2 22".
- 95070381 subject "Integrated circuits Design and construction Congresses.".
- 95070381 subject "Integrated circuits industry Congresses.".
- 95070381 subject "Manufacturing processes Congresses.".
- 95070381 subject "Optical detectors Congresses.".
- 95070381 subject "Semiconductors Design and construction Congresses.".
- 95070381 subject "Semiconductors Testing Optical methods Congresses.".
- 95070381 subject "TK7836 .O68 1995".
- 95070381 title "Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas / John K. Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 95070381 type "text".