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- 95072282 contributor B7508184.
- 95072282 contributor B7508185.
- 95072282 created "c1996.".
- 95072282 date "1996".
- 95072282 date "c1996.".
- 95072282 dateCopyrighted "c1996.".
- 95072282 description "Includes bibliographical references and index.".
- 95072282 extent "vii, 168 p. :".
- 95072282 identifier "0819420611".
- 95072282 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2687".
- 95072282 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2687.".
- 95072282 issued "1996".
- 95072282 issued "c1996.".
- 95072282 language "eng".
- 95072282 publisher "Bellingham, Wash. : SPIE,".
- 95072282 subject "Integrated optics Congresses.".
- 95072282 subject "Micromechanics Congresses.".
- 95072282 subject "Miniature electronic equipment Congresses.".
- 95072282 subject "Optical scanners Congresses.".
- 95072282 subject "TA1660 .M58 1996".
- 95072282 title "Miniaturized systems with micro-optics and micromechanics : 30-31 January 1996, San Jose, California / M. Edward Motamedi, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, ARPA, Advanced Research Projects Agency.".
- 95072282 type "text".