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- 95072314 contributor B7508220.
- 95072314 contributor B7508221.
- 95072314 contributor B7508222.
- 95072314 created "1996.".
- 95072314 date "1996".
- 95072314 date "1996.".
- 95072314 dateCopyrighted "1996.".
- 95072314 description "Includes bibliographical references.".
- 95072314 extent "xiii, 2725 p. :".
- 95072314 identifier "0819421014 (pbk.)".
- 95072314 isPartOf "Proceedings / SPIE--the International Society of Optical Engineering ; v. 2725".
- 95072314 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2725.".
- 95072314 issued "1996".
- 95072314 issued "1996.".
- 95072314 language "eng".
- 95072314 publisher "Bellingham, WA : SPIE,".
- 95072314 subject "621.3815 21".
- 95072314 subject "Integrated circuits Inspection Congresses.".
- 95072314 subject "Integrated circuits Measurement Congresses.".
- 95072314 subject "Microlithography Congresses.".
- 95072314 subject "TK7874 .M4375 1996".
- 95072314 title "Metrology, inspection, and process control for microlithography X : 11-13 March, 1996, Santa Clara, California / sponsored and published by SPIE--the International Society for Optical Engineering ; Susan K. Jones, chair/editor.".
- 95072314 type "text".