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- 95072315 alternative "Optical microlithography 9".
- 95072315 alternative "Optical microlithography nine".
- 95072315 contributor B7508223.
- 95072315 contributor B7508224.
- 95072315 created "c1996.".
- 95072315 date "1996".
- 95072315 date "c1996.".
- 95072315 dateCopyrighted "c1996.".
- 95072315 description "Includes bibliographical references and index.".
- 95072315 extent "2 v. (xii, 914 p.) :".
- 95072315 identifier "0819421022".
- 95072315 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2726.".
- 95072315 isPartOf "SPIE proceedings series ; v. 2726".
- 95072315 issued "1996".
- 95072315 issued "c1996.".
- 95072315 language "eng".
- 95072315 publisher "Bellingham, Wash., USA : SPIE,".
- 95072315 subject "621.3815/31 21".
- 95072315 subject "Integrated circuits Very large scale integration Congresses.".
- 95072315 subject "Microlithography Congresses.".
- 95072315 subject "TK7835 .O66 1996".
- 95072315 title "Optical microlithography 9".
- 95072315 title "Optical microlithography IX : 13-15 March, 1996, Santa Clara, California / Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH.".
- 95072315 title "Optical microlithography nine".
- 95072315 type "text".