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- 95210437 contributor B7633501.
- 95210437 created "1995.".
- 95210437 date "1995".
- 95210437 date "1995.".
- 95210437 dateCopyrighted "1995.".
- 95210437 description "Includes bibliographical references (p. 119-124)".
- 95210437 description "Thesis (doctoral)--Eidgenössische Technischen Hochschule Zürich, 1995.".
- 95210437 extent "xiv, 125 p. :".
- 95210437 identifier "3891919476".
- 95210437 isPartOf "Series in microelectronics, 0936-5362 ; v. 48".
- 95210437 issued "1995".
- 95210437 issued "1995.".
- 95210437 language "Abstract also in German.".
- 95210437 language "eng ger".
- 95210437 language "eng".
- 95210437 publisher "Konstanz : Hartung-Gorre,".
- 95210437 subject "621.3815/2 21".
- 95210437 subject "Integrated circuits Very large scale integration Computer simulation.".
- 95210437 subject "Semiconductors Design and construction Computer simulation.".
- 95210437 subject "TK7874.75 .W47 1995".
- 95210437 subject "Three-dimensional integrated circuits.".
- 95210437 title "Solid modeling applied to three-dimensional semiconductor process simulation / Marc Westermann.".
- 95210437 type "text".