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- 95223076 contributor B7646676.
- 95223076 created "1994.".
- 95223076 date "1994".
- 95223076 date "1994.".
- 95223076 dateCopyrighted "1994.".
- 95223076 description "Includes bibliographical references.".
- 95223076 extent "75 p. :".
- 95223076 identifier "502007019X".
- 95223076 isPartOf "Trudy FTIAN, 0868-7129 ; t. 7".
- 95223076 issued "1994".
- 95223076 issued "1994.".
- 95223076 language "rus eng".
- 95223076 language "rus".
- 95223076 subject "Microelectronics.".
- 95223076 subject "TK7874 .P73933 1994".
- 95223076 title "Problemy mikroėlektronnoĭ tekhnologii / otvetstvennyĭ redaktor toma L.V. Velikov.".
- 95223076 type "text".