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- 95236474 contributor B7661106.
- 95236474 contributor B7661107.
- 95236474 created "c1995.".
- 95236474 date "1995".
- 95236474 date "c1995.".
- 95236474 dateCopyrighted "c1995.".
- 95236474 description "Includes bibliographical references.".
- 95236474 extent "v, 224 p. :".
- 95236474 identifier "0819420093".
- 95236474 isPartOf "Technology tutorial series ; v. 4".
- 95236474 issued "1995".
- 95236474 issued "c1995.".
- 95236474 language "eng".
- 95236474 publisher "Mountain View, Calif., USA : Semiconductor Equipment and Materials International ; Bellingham, Wash. : The Society,".
- 95236474 subject "621.3815/31 20".
- 95236474 subject "Manufacturing processes Congresses.".
- 95236474 subject "Masks (Electronics) Congresses.".
- 95236474 subject "Microlithography Congresses.".
- 95236474 subject "Semiconductors Design and construction Congresses.".
- 95236474 subject "TK7871.85 .T36 1995".
- 95236474 title "Technologies for microlithography manufacturing : 11 July 1995, San Francisco, California / Willard Conley ... [et al.], instructors/authors ; sponsored by SEMI, Semiconductor Equipment and Materials International, SPIE, the International Society for Optical Engineering.".
- 95236474 type "text".