Matches in Library of Congress for { <http://lccn.loc.gov/96006198> ?p ?o. }
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- 96006198 contributor B7742892.
- 96006198 contributor B7742893.
- 96006198 created "c1997.".
- 96006198 date "1997".
- 96006198 date "c1997.".
- 96006198 dateCopyrighted "c1997.".
- 96006198 description "Includes bibliographical references and index.".
- 96006198 extent "xiii, 324 p. :".
- 96006198 identifier "0471138274 (cloth : alk. paper)".
- 96006198 identifier 96006198.html.
- 96006198 identifier 96006198.html.
- 96006198 identifier 96006198.html.
- 96006198 issued "1997".
- 96006198 issued "c1997.".
- 96006198 language "eng".
- 96006198 publisher "New York : J. Wiley,".
- 96006198 subject "621.3815/2 20".
- 96006198 subject "Chemical mechanical planarization.".
- 96006198 subject "Grinding and polishing.".
- 96006198 subject "Microelectronics Materials.".
- 96006198 subject "TK7871 .S77 1997".
- 96006198 title "Chemical mechanical planarization of microelectronic materials / Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann.".
- 96006198 type "text".