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- 96013321 contributor B7751057.
- 96013321 contributor B7751058.
- 96013321 contributor B7751059.
- 96013321 created "c1996.".
- 96013321 date "1996".
- 96013321 date "c1996.".
- 96013321 dateCopyrighted "c1996.".
- 96013321 description "Includes bibliographical references and index.".
- 96013321 extent "xii, 565 p. :".
- 96013321 identifier "0792340116 (acid-free paper)".
- 96013321 identifier 96013321-d.html.
- 96013321 identifier 96013321-t.html.
- 96013321 isPartOf "NATO ASI series. Series E, Applied sciences ; no. 318.".
- 96013321 isPartOf "NATO ASI series: Series E, Applied sciences ; vol. 318".
- 96013321 issued "1996".
- 96013321 issued "c1996.".
- 96013321 language "eng".
- 96013321 publisher "Dordrecht ; Boston : Kluwer Academic Publishers,".
- 96013321 subject "621.3815/2 20".
- 96013321 subject "Rapid thermal processing Congresses.".
- 96013321 subject "Semiconductors Heat treatment Congresses.".
- 96013321 subject "TK7871.85 .A355 1996".
- 96013321 title "Advances in rapid thermal and integrated processing / edited by Fred Roozeboom.".
- 96013321 type "text".