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- 96027499 contributor B7767396.
- 96027499 contributor B7767397.
- 96027499 created "c1996.".
- 96027499 date "1996".
- 96027499 date "c1996.".
- 96027499 dateCopyrighted "c1996.".
- 96027499 description "Includes bibliographical references and indexes.".
- 96027499 extent "xiii, 597 p. :".
- 96027499 identifier "1558993304 (hardcover)".
- 96027499 isPartOf "Materials Research Society symposia proceedings ; v.427.".
- 96027499 isPartOf "Materials Research Society symposium proceedings ; v. 427".
- 96027499 issued "1996".
- 96027499 issued "c1996.".
- 96027499 language "eng".
- 96027499 publisher "Pittsburgh, Pa. : Materials Research Society,".
- 96027499 subject "621.39/5 20".
- 96027499 subject "Integrated circuits Ultra large scale integration Design and construction Congresses.".
- 96027499 subject "Metallic films Congresses.".
- 96027499 subject "Metallizing Congresses.".
- 96027499 subject "Semiconductors Design and construction Congresses.".
- 96027499 subject "TK7874.76 .A32 1996".
- 96027499 title "Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A. / editors, K.N. Tu ... [et al.].".
- 96027499 type "text".