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- 96030857 alternative "Optical methods in surface metrology".
- 96030857 contributor B7771435.
- 96030857 created "c1996.".
- 96030857 date "1996".
- 96030857 date "c1996.".
- 96030857 dateCopyrighted "c1996.".
- 96030857 description "Includes bibliographical references and indexes.".
- 96030857 extent "xxi, 638 p. :".
- 96030857 identifier "0819423475 (alk. paper)".
- 96030857 isPartOf "SPIE milestone series ; v. MS 129".
- 96030857 issued "1996".
- 96030857 issued "c1996.".
- 96030857 language "eng".
- 96030857 publisher "Bellingham, Wash. : SPIE Optical Engineering Press,".
- 96030857 subject "620/.44 20".
- 96030857 subject "Optical measurements.".
- 96030857 subject "Surfaces (Technology) Measurement.".
- 96030857 subject "TA418.7 .S44 1996".
- 96030857 title "Optical methods in surface metrology".
- 96030857 title "Selected papers on optical methods in surface metrology / David J. Whitehouse, editor.".
- 96030857 type "text".