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- 96034081 contributor B7775360.
- 96034081 contributor B7775361.
- 96034081 created "1997.".
- 96034081 date "1997".
- 96034081 date "1997.".
- 96034081 dateCopyrighted "1997.".
- 96034081 description "Includes bibliographical references and index.".
- 96034081 extent "xv, 701 p. :".
- 96034081 identifier "0780310853 (cloth)".
- 96034081 identifier 96034081.html.
- 96034081 identifier 96034081.html.
- 96034081 identifier 96034081.html.
- 96034081 issued "1997".
- 96034081 issued "1997.".
- 96034081 language "eng".
- 96034081 publisher "New York : IEEE Press,".
- 96034081 subject "621.381 20".
- 96034081 subject "Actuators.".
- 96034081 subject "Microelectromechanical systems.".
- 96034081 subject "Microelectronics.".
- 96034081 subject "TK7874 .M4876 1997".
- 96034081 title "Micromechanics and MEMS : classic and seminal papers to 1990 / edited by William S. Trimmer.".
- 96034081 type "text".