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- 96040237 alternative "Microlithography, micromachining, and microfabrication".
- 96040237 contributor B7782601.
- 96040237 created "c1997.".
- 96040237 date "1997".
- 96040237 date "c1997.".
- 96040237 dateCopyrighted "c1997.".
- 96040237 description "Includes bibliographical references and indexes.".
- 96040237 description "v. 1. Microlithography -- v. 2. Micromachining and microfabrication.".
- 96040237 extent "2 v. :".
- 96040237 identifier "0819423785 (v. 1)".
- 96040237 identifier "0819423793 (v. 2)".
- 96040237 isPartOf "IEE materials & devices series ; 12A-12B.".
- 96040237 isPartOf "IEE materials and devices series ; 12A-12B".
- 96040237 issued "1997".
- 96040237 issued "c1997.".
- 96040237 language "eng".
- 96040237 publisher "Bellingham, Wash., USA : SPIE Optical Engineering Press ; London, UK : Institution of Electrical Engineers,".
- 96040237 subject "670 21".
- 96040237 subject "Microfabrication.".
- 96040237 subject "Microlithography.".
- 96040237 subject "Micromachining.".
- 96040237 subject "TK7836 .H3423 1997".
- 96040237 tableOfContents "v. 1. Microlithography -- v. 2. Micromachining and microfabrication.".
- 96040237 title "Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, editor.".
- 96040237 title "Microlithography, micromachining, and microfabrication".
- 96040237 type "text".