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- 96043344 contributor B7785610.
- 96043344 created "c1997.".
- 96043344 date "1997".
- 96043344 date "c1997.".
- 96043344 dateCopyrighted "c1997.".
- 96043344 description "Includes bibliographical references (p. 565-569) and index.".
- 96043344 extent "589 p., [22] p. of plates :".
- 96043344 identifier "0849394511 (acid-free paper)".
- 96043344 issued "1997".
- 96043344 issued "c1997.".
- 96043344 language "eng".
- 96043344 publisher "Boca Raton, Fla. : CRC Press,".
- 96043344 subject "621.3815/2 20".
- 96043344 subject "Integrated circuits Design and construction.".
- 96043344 subject "Lasers Industrial applications.".
- 96043344 subject "Machining.".
- 96043344 subject "Microelectromechanical systems Design and construction.".
- 96043344 subject "Microelectronic packaging.".
- 96043344 subject "Microelectronics.".
- 96043344 subject "TK7836 .M33 1997".
- 96043344 title "Fundamentals of microfabrication / Marc Madou.".
- 96043344 type "text".