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- 96068303 contributor B7800779.
- 96068303 contributor B7800780.
- 96068303 created "c1996.".
- 96068303 date "1996".
- 96068303 date "c1996.".
- 96068303 dateCopyrighted "c1996.".
- 96068303 description "Includes bibliographic references and index.".
- 96068303 extent "x, 348 p. :".
- 96068303 identifier "0819421936".
- 96068303 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2805".
- 96068303 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2805.".
- 96068303 issued "1996".
- 96068303 issued "c1996.".
- 96068303 language "eng".
- 96068303 publisher "Bellingham, Wash. : The Society,".
- 96068303 subject "522/.6863 21".
- 96068303 subject "Extreme ultraviolet lithography Congresses.".
- 96068303 subject "Grazing incidence Congresses.".
- 96068303 subject "Mirrors Design and construction Congresses.".
- 96068303 subject "QC374 .M86 1996".
- 96068303 subject "Ultraviolet astronomy Congresses.".
- 96068303 subject "X-ray astronomy Congresses.".
- 96068303 subject "X-ray lithography Congresses.".
- 96068303 subject "X-ray optics Congresses.".
- 96068303 title "Multilayer and grazing incidence X-ray/EUV optics III : 5-6 August, 1996, Denver, Colorado / Richard B. Hoover, Arthur B.C. Walker, Jr., chair/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 96068303 type "text".