Matches in Library of Congress for { <http://lccn.loc.gov/96068360> ?p ?o. }
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- 96068360 contributor B7800870.
- 96068360 contributor B7800871.
- 96068360 created "c1996.".
- 96068360 date "1996".
- 96068360 date "c1996.".
- 96068360 dateCopyrighted "c1996.".
- 96068360 description "Includes bibliographical references and index.".
- 96068360 extent "vii, 188 p. :".
- 96068360 identifier "0819422509".
- 96068360 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2862.".
- 96068360 isPartOf "SPIE proceedings series ; v. 2862".
- 96068360 issued "1996".
- 96068360 issued "c1996.".
- 96068360 language "eng".
- 96068360 publisher "Bellingham, Wash. : SPIE-The International Society for Optical Engineering,".
- 96068360 subject "621.3815/2 21".
- 96068360 subject "Flatness measurement Congresses.".
- 96068360 subject "Semiconductor wafers Measurement Congresses.".
- 96068360 subject "Surface roughness Measurement Congresses.".
- 96068360 subject "TK7871.85 .F62 1996".
- 96068360 title "Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado / John C. Stover, chair/editor.".
- 96068360 type "text".