Matches in Library of Congress for { <http://lccn.loc.gov/96068444> ?p ?o. }
Showing items 1 to 22 of
22
with 100 items per page.
- 96068444 contributor B7800928.
- 96068444 contributor B7800929.
- 96068444 contributor B7800930.
- 96068444 created "c1996.".
- 96068444 date "1996".
- 96068444 date "c1996.".
- 96068444 dateCopyrighted "c1996.".
- 96068444 description "Includes bibliographical references and index.".
- 96068444 extent "237 p. :".
- 96068444 identifier "0780330617 (microfiche)".
- 96068444 identifier "0965157709 (softbound)".
- 96068444 issued "1996".
- 96068444 issued "c1996.".
- 96068444 language "eng".
- 96068444 publisher "Sunnyvale, CA : Northern California Chapter of the American Vacuum Society,".
- 96068444 subject "621.3815/2 20".
- 96068444 subject "Plasma radiation Congresses.".
- 96068444 subject "Semiconductor wafers Congresses.".
- 96068444 subject "Semiconductors Effect of radiation on Congresses.".
- 96068444 subject "TK7871.85 .I5834 1996".
- 96068444 title "1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA / Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel, editors ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics.".
- 96068444 type "text".