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- 96069366 contributor B7801637.
- 96069366 contributor B7801638.
- 96069366 contributor B7801639.
- 96069366 created "c1996.".
- 96069366 date "1996".
- 96069366 date "c1996.".
- 96069366 dateCopyrighted "c1996.".
- 96069366 description "Includes bibliographical references and index.".
- 96069366 extent "x, 586 p. :".
- 96069366 identifier "0819422827 (pbk.)".
- 96069366 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2884.".
- 96069366 isPartOf "SPIE proceedings series ; v. 2884".
- 96069366 issued "1996".
- 96069366 issued "c1996.".
- 96069366 language "eng".
- 96069366 publisher "Bellingham, Wash. : SPIE,".
- 96069366 subject "Integrated circuits Masks Congresses.".
- 96069366 subject "Microlithography Congresses.".
- 96069366 subject "TK7874 .S9435 1996".
- 96069366 title "16th Annual Symposium on Photomask Technology and Management : proceedings, 18-20 September 1996, Redwood City, California / Gilbert V. Shelden, James A. Reynolds., chairs/editors ; sponsored by BACUS.".
- 96069366 type "text".