Matches in Library of Congress for { <http://lccn.loc.gov/96069470> ?p ?o. }
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- 96069470 contributor B7801689.
- 96069470 contributor B7801690.
- 96069470 created "c1996.".
- 96069470 date "1996".
- 96069470 date "c1996.".
- 96069470 dateCopyrighted "c1996.".
- 96069470 description "Includes bibliographic references and author index.".
- 96069470 extent "viii, 392 p. :".
- 96069470 identifier "0819422738".
- 96069470 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2875".
- 96069470 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2875.".
- 96069470 issued "1996".
- 96069470 issued "c1996.".
- 96069470 language "eng".
- 96069470 publisher "Bellingham, Wash., USA : SPIE,".
- 96069470 subject "621.381 21".
- 96069470 subject "Microelectronics Congresses.".
- 96069470 subject "TK7874 .M4676 1996".
- 96069470 title "Microelectronic device and multilevel interconnection technology II : 16-17 October, 1996, Austin, Texas / Ih-chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].".
- 96069470 type "text".