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- 96069471 contributor B7801691.
- 96069471 contributor B7801692.
- 96069471 created "c1996.".
- 96069471 date "1996".
- 96069471 date "c1996.".
- 96069471 dateCopyrighted "c1996.".
- 96069471 description "Includes bibliographic references and author index.".
- 96069471 extent "vii, 258 p. :".
- 96069471 identifier "0819422746".
- 96069471 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2876".
- 96069471 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2876.".
- 96069471 issued "1996".
- 96069471 issued "c1996.".
- 96069471 language "eng".
- 96069471 publisher "Bellingham, Wash., USA : SPIE,".
- 96069471 subject "Dielectric films Congresses.".
- 96069471 subject "Integrated circuits Design and construction Congresses.".
- 96069471 subject "Metallizing Congresses.".
- 96069471 subject "Plasma etching Congresses.".
- 96069471 subject "TK7874 .P7519 1996".
- 96069471 title "Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October 1996, Austin, Texas / Armando Iturralde, Te-Hua Lin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].".
- 96069471 type "text".