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- 96069472 contributor B7801693.
- 96069472 contributor B7801694.
- 96069472 created "c1996.".
- 96069472 date "1996".
- 96069472 date "c1996.".
- 96069472 dateCopyrighted "c1996.".
- 96069472 description "Includes bibliographical references and index.".
- 96069472 extent "ix, 218 p. :".
- 96069472 identifier "0819422754".
- 96069472 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2877.".
- 96069472 isPartOf "SPIE proceedings series ; v. 2877".
- 96069472 issued "1996".
- 96069472 issued "c1996.".
- 96069472 language "eng".
- 96069472 publisher "Bellingham, Wash. : SPIE,".
- 96069472 subject "621.3815/2 22".
- 96069472 subject "Integrated circuits Design and construction Congresses.".
- 96069472 subject "Integrated circuits industry Congresses.".
- 96069472 subject "Manufacturing processes Congresses.".
- 96069472 subject "Optical detectors Congresses.".
- 96069472 subject "Semiconductors Design and construction Congresses.".
- 96069472 subject "Semiconductors Testing Optical methods Congresses.".
- 96069472 subject "TK7836 .O69 1999".
- 96069472 title "Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas / Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]".
- 96069472 type "text".