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- 96069473 contributor B7801695.
- 96069473 contributor B7801696.
- 96069473 created "c1996.".
- 96069473 date "1996".
- 96069473 date "c1996.".
- 96069473 dateCopyrighted "c1996.".
- 96069473 extent "ix, 366 p. :".
- 96069473 identifier "0819422770".
- 96069473 isPartOf "Proceedings / SPIE--the International Society of Optical Engineering ; v. 2879".
- 96069473 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2879.".
- 96069473 issued "1996".
- 96069473 issued "c1996.".
- 96069473 language "eng".
- 96069473 publisher "Bellingham, Wash. : SPIE--The International Society of Optical Engineering,".
- 96069473 subject "621.3815/2 21".
- 96069473 subject "Electromechanical devices Design and construction Congresses.".
- 96069473 subject "Microfabrication Congresses.".
- 96069473 subject "Micromachining Congresses.".
- 96069473 subject "TJ1191.5 .M55 1996".
- 96069473 title "Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas / Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories.".
- 96069473 type "text".