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- 96069474 contributor B7801697.
- 96069474 contributor B7801698.
- 96069474 created "1996.".
- 96069474 date "1996".
- 96069474 date "1996.".
- 96069474 dateCopyrighted "1996.".
- 96069474 description "Includes bibliographic references and index.".
- 96069474 extent "ix, 296 p. :".
- 96069474 identifier "0819422789".
- 96069474 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 2880".
- 96069474 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2880.".
- 96069474 issued "1996".
- 96069474 issued "1996.".
- 96069474 language "eng".
- 96069474 publisher "Bellingham, Wash., USA : SPIE,".
- 96069474 subject "621.3815/2 21".
- 96069474 subject "Measurement Congresses.".
- 96069474 subject "Microlithography Congresses.".
- 96069474 subject "Micromachining Congresses.".
- 96069474 subject "TJ1191.5 .M53 1996".
- 96069474 title "Microlithography and metrology in micromachining II : 14-15 October, 1996, Austin, Texas / Michael T. Postek, Craig Friedrich, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology.".
- 96069474 type "text".