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- 96069475 contributor B7801699.
- 96069475 contributor B7801700.
- 96069475 created "1996.".
- 96069475 date "1996".
- 96069475 date "1996.".
- 96069475 dateCopyrighted "1996.".
- 96069475 description "Includes bibliographical references.".
- 96069475 extent "v, 220 p. :".
- 96069475 identifier "0819422797 (pbk.)".
- 96069475 isPartOf "Proceedings / SPIE--the International Society of Optical Engineering ; v. 2881".
- 96069475 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 2881.".
- 96069475 issued "1996".
- 96069475 issued "1996.".
- 96069475 language "eng".
- 96069475 publisher "Bellingham, WA : SPIE,".
- 96069475 subject "Microelectromechanical systems Congresses.".
- 96069475 subject "Microelectronics Congresses.".
- 96069475 subject "Optical data processing Equipment and supplies Congresses.".
- 96069475 subject "Optoelectronics Congresses.".
- 96069475 subject "TK7874 .M4738 1996".
- 96069475 title "Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas / M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology.".
- 96069475 type "text".