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- 96078683 contributor B7807562.
- 96078683 contributor B7807563.
- 96078683 contributor B7807564.
- 96078683 created "c1996.".
- 96078683 date "1996".
- 96078683 date "c1996.".
- 96078683 dateCopyrighted "c1996.".
- 96078683 description "Includes bibliographical references and index.".
- 96078683 extent "viii, 460 p. :".
- 96078683 identifier "0791815412".
- 96078683 isPartOf "DSC (Series) ; v. 59.".
- 96078683 isPartOf "DSC ; vol. 59".
- 96078683 issued "1996".
- 96078683 issued "c1996.".
- 96078683 language "eng".
- 96078683 publisher "New York, N.Y. : American Society of Mechanical Engineers,".
- 96078683 subject "621 21".
- 96078683 subject "Electromechanical devices Congresses.".
- 96078683 subject "Microelectromechanical systems Congresses.".
- 96078683 subject "Microelectronics Congresses.".
- 96078683 subject "TK7874 .M4674 1996".
- 96078683 title "Microelectromechanical systems (MEMS) : microscale thermal phenomena in electronic systems, applications of miocrofabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia / sponsored by the Dynamic Systems and Control Division, ASME ... [et al.] ; organizers, C. Thomas Avedisian ... [et al.].".
- 96078683 type "text".