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- 96150524 alternative "Micro electro mechanical systems workshop.".
- 96150524 contributor B7869403.
- 96150524 contributor B7869404.
- 96150524 created "1995.".
- 96150524 date "1995".
- 96150524 date "1995.".
- 96150524 dateCopyrighted "1995.".
- 96150524 description "Includes bibliographical references and index.".
- 96150524 extent "418 p. :".
- 96150524 identifier "0780325036 (softbound)".
- 96150524 identifier "0780325044 (casebound)".
- 96150524 identifier "0780325052 (microfiche)".
- 96150524 issued "1995".
- 96150524 issued "1995.".
- 96150524 language "eng".
- 96150524 publisher "[New York] : Institute of Electrical and Electronics Engineers,".
- 96150524 subject "Actuators Congresses.".
- 96150524 subject "Detectors Congresses.".
- 96150524 subject "Electromechanical devices Congresses.".
- 96150524 subject "Microelectronics Congresses.".
- 96150524 subject "TK153 .I344 1995".
- 96150524 title "IEEE micro electro mechanical systems : proceedings, Amsterdam, the Netherlands, January 29-February 2, 1995 / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division.".
- 96150524 title "Micro electro mechanical systems workshop.".
- 96150524 type "text".