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- 97026052 contributor B8053880.
- 97026052 created "c1998.".
- 97026052 date "1998".
- 97026052 date "c1998.".
- 97026052 dateCopyrighted "c1998.".
- 97026052 description "Includes bibliographical references and index.".
- 97026052 description "v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.".
- 97026052 extent "2 v. :".
- 97026052 identifier "0471966819 (v. 1 : alk. paper)".
- 97026052 identifier "0471966827 (v. 2 : alk. paper)".
- 97026052 identifier "0471980846 (set : alk. paper)".
- 97026052 identifier 97026052.html.
- 97026052 identifier 97026052.html.
- 97026052 issued "1998".
- 97026052 issued "c1998.".
- 97026052 language "eng".
- 97026052 publisher "Chichester, England ; New York : Wiley,".
- 97026052 subject "621.3815/2 21".
- 97026052 subject "Microfabrication.".
- 97026052 subject "Micromachining.".
- 97026052 subject "Semiconductors Design and construction.".
- 97026052 subject "TK7871.85 .S4295 1998".
- 97026052 tableOfContents "v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.".
- 97026052 title "Semiconductor micromachining / edited by S.A. Campbell, H.J. Lewerenz.".
- 97026052 type "text".