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- 97027288 contributor B8055341.
- 97027288 created "c1997.".
- 97027288 date "1997".
- 97027288 date "c1997.".
- 97027288 dateCopyrighted "c1997.".
- 97027288 description "Includes bibliographical references (p. 325-341) and index.".
- 97027288 extent "xiv, 352 p. :".
- 97027288 identifier "3540631828 (Berlin : acid-free paper)".
- 97027288 isPartOf "Springer series in electronics and photonics, 0172-5734 ; v. 34".
- 97027288 issued "1997".
- 97027288 issued "c1997.".
- 97027288 language "eng".
- 97027288 publisher "Berlin ; New York : Springer,".
- 97027288 subject "621.3815/284 21".
- 97027288 subject "Dielectric devices.".
- 97027288 subject "Integrated circuits Ultra large scale integration.".
- 97027288 subject "Metal oxide semiconductors.".
- 97027288 subject "Silicon-on-insulator technology.".
- 97027288 subject "TK7874.76 .H67 1997".
- 97027288 title "Gate dielectrics and MOS ULSIs : principles, technologies, and applications / Takashi Hori.".
- 97027288 type "text".