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- 97028526 contributor B8056806.
- 97028526 created "c1997.".
- 97028526 date "1997".
- 97028526 date "c1997.".
- 97028526 dateCopyrighted "c1997.".
- 97028526 description "Includes bibliographical references and indexes.".
- 97028526 extent "xiii, 545 p. :".
- 97028526 identifier "1558993819".
- 97028526 identifier 97028526-d.html.
- 97028526 isPartOf "Materials Research Society symposia proceedings ; v. 477.".
- 97028526 isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 477".
- 97028526 issued "1997".
- 97028526 issued "c1997.".
- 97028526 language "eng".
- 97028526 publisher "Pittsburgh, Pa. : Materials Research Society,".
- 97028526 subject "621.3815/2 21".
- 97028526 subject "Semiconductors Cleaning Congresses.".
- 97028526 subject "Semiconductors Surfaces Congresses.".
- 97028526 subject "Surface chemistry Congresses.".
- 97028526 subject "Surface preparation Congresses.".
- 97028526 subject "TK7871.85 .S396 1997".
- 97028526 title "Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A. / editors, Gregg S. Higashi ... [et al.].".
- 97028526 type "text".