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- 97036151 contributor B8065792.
- 97036151 created "c1997.".
- 97036151 date "1997".
- 97036151 date "c1997.".
- 97036151 dateCopyrighted "c1997.".
- 97036151 description "Includes bibliographical references and index.".
- 97036151 extent "xv, 541 p. :".
- 97036151 identifier "1558993738".
- 97036151 identifier 97036151-d.html.
- 97036151 isPartOf "Materials Research Society symposia proceedings ; v. 469.".
- 97036151 isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 469".
- 97036151 issued "1997".
- 97036151 issued "c1997.".
- 97036151 language "eng".
- 97036151 publisher "Pittsburgh, Pa. : Materials Research Society,".
- 97036151 subject "621.3815/2 21".
- 97036151 subject "Semiconductor doping Congresses.".
- 97036151 subject "Semiconductors Defects Congresses.".
- 97036151 subject "Silicon crystals Defects Congresses.".
- 97036151 subject "TK7871.85 .D45453 1997".
- 97036151 title "Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A. / editors, Tomas Diaz de la Rubia ... [et al.].".
- 97036151 type "text".