Matches in Library of Congress for { <http://lccn.loc.gov/97039210> ?p ?o. }
Showing items 1 to 22 of
22
with 100 items per page.
- 97039210 contributor B8069417.
- 97039210 contributor B8069418.
- 97039210 created "1998.".
- 97039210 date "1998".
- 97039210 date "1998.".
- 97039210 dateCopyrighted "1998.".
- 97039210 description "Includes bibliographical references and index.".
- 97039210 extent "viii, 347 p. :".
- 97039210 identifier "019856287X".
- 97039210 identifier 97039210-d.html.
- 97039210 identifier 97039210-t.html.
- 97039210 isPartOf "Series on semiconductor science and technology ; 7".
- 97039210 issued "1998".
- 97039210 issued "1998.".
- 97039210 language "eng".
- 97039210 publisher "New York : Oxford University Press,".
- 97039210 subject "621.3815/31 21".
- 97039210 subject "Plasma etching.".
- 97039210 subject "Semiconductors Etching.".
- 97039210 subject "TK7871.85 .S88 1998".
- 97039210 title "Plasma etching : fundamentals and applications / M. Sugawara ; with contributions from Barry L. Stonsfield ... [et al.].".
- 97039210 type "text".