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- 97043732 contributor B8074602.
- 97043732 contributor B8074603.
- 97043732 created "1998.".
- 97043732 date "1998".
- 97043732 date "1998.".
- 97043732 dateCopyrighted "1998.".
- 97043732 description "Includes bibliographical references.".
- 97043732 extent "xiii, 405 p. :".
- 97043732 identifier "052159054X (hb)".
- 97043732 identifier 97043732.html.
- 97043732 identifier 97043732.html.
- 97043732 identifier 97043732.html.
- 97043732 isPartOf "Cambridge studies in semiconductor physics and microelectronic engineering ; 7".
- 97043732 issued "1998".
- 97043732 issued "1998.".
- 97043732 language "eng".
- 97043732 publisher "Cambridge, [England] ; New York : Cambridge University Press,".
- 97043732 subject "621.3815 21".
- 97043732 subject "Etching.".
- 97043732 subject "Micromachining.".
- 97043732 subject "Silicon.".
- 97043732 subject "TK7871.15.S55 E49 1998".
- 97043732 title "Silicon micromachining / M. Elwenspoek and H.V. Jansen.".
- 97043732 type "text".