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- 97065930 alternative "2nd International Symposium on Plasma Process-Induced Damage".
- 97065930 alternative "P2ID".
- 97065930 contributor B8086796.
- 97065930 contributor B8086797.
- 97065930 contributor B8086798.
- 97065930 created "c1997.".
- 97065930 date "1997".
- 97065930 date "c1997.".
- 97065930 dateCopyrighted "c1997.".
- 97065930 description "Includes bibliographical references and index.".
- 97065930 extent "i, 259 p. :".
- 97065930 identifier "0780338227 (microfiche)".
- 97065930 identifier "0965157717 (softbound)".
- 97065930 issued "1997".
- 97065930 issued "c1997.".
- 97065930 language "eng".
- 97065930 publisher "Sunnyvale, Calif. : Northern California Chapter of the American Vacuum Society,".
- 97065930 subject "621.3815/2 21".
- 97065930 subject "Plasma etching Congresses.".
- 97065930 subject "Semiconductor wafers Defects Congresses.".
- 97065930 subject "Semiconductors Effect of radiation on Congresses.".
- 97065930 subject "TK7871.85 .I5834 1997".
- 97065930 title "1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA / editors, Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics.".
- 97065930 title "2nd International Symposium on Plasma Process-Induced Damage".
- 97065930 title "P2ID".
- 97065930 type "text".