Matches in Library of Congress for { <http://lccn.loc.gov/97075227> ?p ?o. }
Showing items 1 to 24 of
24
with 100 items per page.
- 97075227 alternative "International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces".
- 97075227 contributor B8093999.
- 97075227 contributor B8094000.
- 97075227 created "1998.".
- 97075227 date "1998".
- 97075227 date "1998.".
- 97075227 dateCopyrighted "1998.".
- 97075227 description "Includes bibliographical references and index.".
- 97075227 extent "p. 212-382 :".
- 97075227 identifier "1563967693".
- 97075227 issued "1998".
- 97075227 issued "1998.".
- 97075227 language "eng".
- 97075227 publisher "New York : Published for the American Vacuum Society by the American Institute of Physics,".
- 97075227 subject "530.4/17 21".
- 97075227 subject "Microelectronics Congresses.".
- 97075227 subject "Nonequilibrium plasmas Congresses.".
- 97075227 subject "Plasma etching Congresses.".
- 97075227 subject "QC718.5.E66 I58 1997".
- 97075227 subject "Surfaces (Physics) Congresses.".
- 97075227 subject "Surfaces (Technology) Congresses.".
- 97075227 title "International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces".
- 97075227 title "Papers from the International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces (BANPIS '97) : 26-27 January 1997, Nanki Seaside Lodge, Shirahama, Wakayama, Japan / sponsored by AFOSR/AOARD ; in cooperation with the Japan Society of Applied Physics and the American Vacuum Society.".
- 97075227 type "text".