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- 97080378 alternative "Statistical metrology".
- 97080378 alternative "Workshop on statistical metrology".
- 97080378 contributor B8096840.
- 97080378 contributor B8096841.
- 97080378 created "c1998.".
- 97080378 date "1998".
- 97080378 date "c1998.".
- 97080378 dateCopyrighted "c1998.".
- 97080378 description "Includes bibliographical references.".
- 97080378 extent "vi, 121 p. :".
- 97080378 identifier "0780343387 (softbound)".
- 97080378 identifier "0780343395 (microfiche)".
- 97080378 issued "1998".
- 97080378 issued "c1998.".
- 97080378 language "eng".
- 97080378 publisher "Piscataway, New Jersey : IEEE ; Gaithersburg, Maryland : Widerkehr and Associates,".
- 97080378 subject "621.3815/2 21".
- 97080378 subject "Semiconductors Characterization Statistical methods Congresses.".
- 97080378 subject "Semiconductors Measurement Congresses.".
- 97080378 subject "TK7871.85 .I5844 1998".
- 97080378 title "IWSM : 1998 3rd International Workshop on Statistical Metrology : June 7, 1998, Honolulu / [sponsored by] IEEE Electron Devices Society.".
- 97080378 title "Statistical metrology".
- 97080378 title "Workshop on statistical metrology".
- 97080378 type "text".