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- 97080865 contributor B8097295.
- 97080865 created "1997.".
- 97080865 date "1997".
- 97080865 date "1997.".
- 97080865 dateCopyrighted "1997.".
- 97080865 description "Includes bibliographical references (p. 51-55).".
- 97080865 extent "xiv, 61 p. :".
- 97080865 identifier "0309058856".
- 97080865 issued "1997".
- 97080865 issued "1997.".
- 97080865 language "eng".
- 97080865 publisher "Washington, DC : National Academy Press,".
- 97080865 subject "621.381 21".
- 97080865 subject "Microelectromechanical systems Design and construction.".
- 97080865 subject "Microelectronics Materials.".
- 97080865 subject "TK7874 .N333 1997".
- 97080865 title "Microelectromechanical systems : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.".
- 97080865 type "text".