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- 97102079 alternative "1995 Advanced Semiconductor Manufacturing Conference and Workshop".
- 97102079 alternative "Semiconductor manufacturing, economic solutions for the 21st century".
- 97102079 contributor B8102242.
- 97102079 contributor B8102243.
- 97102079 created "c1995.".
- 97102079 date "1995".
- 97102079 date "c1995.".
- 97102079 dateCopyrighted "c1995.".
- 97102079 description "Includes bibliographical references.".
- 97102079 extent "[ix], 391 p. :".
- 97102079 identifier "0780327136 (softbound)".
- 97102079 identifier "0780327144 (casebound)".
- 97102079 identifier "0780327152 (microfiche)".
- 97102079 issued "1995".
- 97102079 issued "c1995.".
- 97102079 language "eng".
- 97102079 publisher "New York : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center [distributor],".
- 97102079 subject "IN PROCESS (UTILITY LOAD)".
- 97102079 subject "Process control Congresses.".
- 97102079 subject "Semiconductor industry Congresses.".
- 97102079 subject "Semiconductors Design and construction Congresses.".
- 97102079 title "1995 Advanced Semiconductor Manufacturing Conference and Workshop".
- 97102079 title "Semiconductor manufacturing, economic solutions for the 21st century".
- 97102079 type "text".