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- 97109713 contributor B8110691.
- 97109713 contributor B8110692.
- 97109713 created "1993.".
- 97109713 date "1993".
- 97109713 date "1993.".
- 97109713 dateCopyrighted "1993.".
- 97109713 description "Includes bibliographical references.".
- 97109713 extent "68 p. :".
- 97109713 issued "1993".
- 97109713 issued "1993.".
- 97109713 language "rus".
- 97109713 publisher "Moskva : Moskovskiĭ in-t ėlektronnoĭ tekhniki,".
- 97109713 subject "Integrated circuits Design and construction.".
- 97109713 subject "TK7874 .T434 1993".
- 97109713 title "Tekhnologicheskoe oborudovanie mikroėlektroniki : sbornik nauchnykh trudov / pod redakt︠s︡ieĭ V.M. Redina.".
- 97109713 type "text".