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- 97119210 contributor B8121150.
- 97119210 created "c1996.".
- 97119210 date "1996".
- 97119210 date "c1996.".
- 97119210 dateCopyrighted "c1996.".
- 97119210 description "Includes bibliographical references and index.".
- 97119210 extent "iv, 367 p. :".
- 97119210 issued "1996".
- 97119210 issued "c1996.".
- 97119210 language "eng".
- 97119210 publisher "Nashua, NH : PennWell Pub. Co.,".
- 97119210 subject "620.8/6 21".
- 97119210 subject "Clean rooms Congresses.".
- 97119210 subject "Contamination (Technology) Congresses.".
- 97119210 subject "TH7694 .C555 1996".
- 97119210 title "CleanRooms '96 West : the Conference on Advanced Microcontamination Control and Ultrapure Manufacturing : conference, October 28-30, exhibits, October 29-30, Santa Clara Convention Center, Santa Clara, CA : proceedings.".
- 97119210 type "text".