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- 97131850 alternative "Micro electro mechanical systems workshop.".
- 97131850 contributor B8135204.
- 97131850 contributor B8135205.
- 97131850 created "c1996.".
- 97131850 date "1996".
- 97131850 date "c1996.".
- 97131850 dateCopyrighted "c1996.".
- 97131850 description "Includes bibliographical references.".
- 97131850 extent "xxiv, 530 p. :".
- 97131850 identifier "0780329856 (softbound)".
- 97131850 identifier "0780329864 (casebound)".
- 97131850 identifier "0780329872 (microfiche)".
- 97131850 issued "1996".
- 97131850 issued "c1996.".
- 97131850 language "eng".
- 97131850 publisher "[New York] : Institute of Electrical and Electronics Engineers,".
- 97131850 subject "Actuators Congresses.".
- 97131850 subject "Detectors Congresses.".
- 97131850 subject "Electromechanical devices Congresses.".
- 97131850 subject "Microelectronics Congresses.".
- 97131850 subject "TK153 .I35 1996".
- 97131850 title "IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings, San Diego, California, USA, February 11-15, 1996 / sponsored by the IEEE Robotics and Automation Society.".
- 97131850 title "Micro electro mechanical systems workshop.".
- 97131850 type "text".