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- 97145405 alternative "Investigation of micro structures, sensors, actuators, machines and robots".
- 97145405 alternative "Micro electro mechanical systems".
- 97145405 contributor B8150299.
- 97145405 contributor B8150300.
- 97145405 created "c1997.".
- 97145405 date "1997".
- 97145405 date "c1997.".
- 97145405 dateCopyrighted "c1997.".
- 97145405 description "Includes bibliographical references and indexes.".
- 97145405 extent "xxiv, 545 p. :".
- 97145405 identifier "0780337441 (softbound)".
- 97145405 identifier "078033745X (casebound)".
- 97145405 identifier "0780337468 (microfiche)".
- 97145405 issued "1997".
- 97145405 issued "c1997.".
- 97145405 language "eng".
- 97145405 publisher "[New York] : Institute of Electrical and Electronics Engineers,".
- 97145405 subject "621.381 21".
- 97145405 subject "Actuators Congresses.".
- 97145405 subject "Detectors Congresses.".
- 97145405 subject "Microelectromechanical systems Congresses.".
- 97145405 subject "Microelectronics Congresses.".
- 97145405 subject "TK7874 .I32747 1997".
- 97145405 title "Investigation of micro structures, sensors, actuators, machines and robots".
- 97145405 title "Micro electro mechanical systems".
- 97145405 title "The Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : proceedings, Nagoya, Japan, January 26-30, 1997 / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center.".
- 97145405 type "text".