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- 97151761 contributor B8157330.
- 97151761 contributor B8157331.
- 97151761 created "c1996.".
- 97151761 date "1996".
- 97151761 date "c1996.".
- 97151761 dateCopyrighted "c1996.".
- 97151761 description "Includes bibliographical references and index.".
- 97151761 extent "868 p. :".
- 97151761 identifier "3800722003".
- 97151761 issued "1996".
- 97151761 issued "c1996.".
- 97151761 language "eng".
- 97151761 publisher "Berlin : VDE-Verlag,".
- 97151761 subject "621.381 21".
- 97151761 subject "Electronic circuit design Data processing Congresses.".
- 97151761 subject "Electronic packaging Congresses.".
- 97151761 subject "High technology Congresses.".
- 97151761 subject "Microelectronics Congresses.".
- 97151761 subject "Microelectronics Materials Congresses.".
- 97151761 subject "TK7874 .I472 1996".
- 97151761 title "Micro system technologies 96 / 5th International Conference on Micro, Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996 ; Herbert Reichl, Anton Heuberger, editors.".
- 97151761 type "text".