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- 97175564 contributor B8183469.
- 97175564 contributor B8183470.
- 97175564 created "c1997.".
- 97175564 date "1997".
- 97175564 date "c1997.".
- 97175564 dateCopyrighted "c1997.".
- 97175564 description "Includes bibliographical references and indexes.".
- 97175564 extent "xvi, 608 p. :".
- 97175564 identifier "1558993851".
- 97175564 isPartOf "Conference proceedings, 1048-0854".
- 97175564 isPartOf "Materials Research Society conference proceedings.".
- 97175564 issued "1997".
- 97175564 issued "c1997.".
- 97175564 language "eng".
- 97175564 publisher "Pittsburgh, Pa. : Materials Research Society,".
- 97175564 subject "621.39/5 21".
- 97175564 subject "Dielectrics Congresses.".
- 97175564 subject "Electrochemical metallizing Congresses.".
- 97175564 subject "Integrated circuits Ultra large scale integration Design and construction Congresses.".
- 97175564 subject "TK7874.76 .A312 1997".
- 97175564 subject "Titanium nitride Congresses.".
- 97175564 subject "Vapor-plating Congresses.".
- 97175564 title "Advanced metallization and interconnect systems for ULSI applications in 1996 : proceedings of the conference held October 1-3, 1996, in Boston, Massachusetts, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 23-24, 1996, in Tokyo, Japan / editors, Robert Havemann ... [et al.].".
- 97175564 type "text".