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- 97176955 alternative "Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems".
- 97176955 contributor B8184991.
- 97176955 contributor B8184992.
- 97176955 created "[1997]".
- 97176955 date "1997".
- 97176955 date "[1997]".
- 97176955 dateCopyrighted "[1997]".
- 97176955 description "Includes bibliographical references (p. 17-18).".
- 97176955 extent "xiii, 23 p. :".
- 97176955 isPartOf "NIST special publication ; 260-129".
- 97176955 isPartOf "Standard reference materials".
- 97176955 issued "1997".
- 97176955 issued "[1997]".
- 97176955 language "eng".
- 97176955 publisher "Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; Washington, D.C. : For sale by the Supt. of Docs., U.S. G.P.O,".
- 97176955 subject "602/.18 s 502.8/2 21".
- 97176955 subject "Chromium Spectra Standards.".
- 97176955 subject "Integrated circuits Masks Measurement.".
- 97176955 subject "Microscopes Calibration Standards.".
- 97176955 subject "QC100 .U57 no. 260-129 no. 260-129".
- 97176955 title "Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems / James E. Potzick.".
- 97176955 title "Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems".
- 97176955 type "text".