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- 97190680 alternative "Microstructures and microfabricated systems 3".
- 97190680 alternative "Microstructures and microfabricated systems III".
- 97190680 alternative "Microstructures and microfabricated systems three".
- 97190680 contributor B8200275.
- 97190680 contributor B8200276.
- 97190680 contributor B8200277.
- 97190680 created "c1997.".
- 97190680 date "1997".
- 97190680 date "c1997.".
- 97190680 dateCopyrighted "c1997.".
- 97190680 description "Includes bibliographical references and indexes.".
- 97190680 extent "vii, 217 p. :".
- 97190680 identifier "1566771323".
- 97190680 isPartOf "Proceedings (Electrochemical Society) ; v. 97-5.".
- 97190680 isPartOf "Proceedings ; 97-5".
- 97190680 issued "1997".
- 97190680 issued "c1997.".
- 97190680 language "eng".
- 97190680 publisher "Pennington, NJ : Electrochemical Society,".
- 97190680 subject "621.381 21".
- 97190680 subject "Microelectronics Congresses.".
- 97190680 subject "Micromachining Congresses.".
- 97190680 subject "Micromechanics Congresses.".
- 97190680 subject "Microstructure Congresses.".
- 97190680 subject "TK7874 .I47375 1997".
- 97190680 title "Microstructures and microfabricated systems 3".
- 97190680 title "Microstructures and microfabricated systems III".
- 97190680 title "Microstructures and microfabricated systems three".
- 97190680 title "Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems / editors, P.J. Hesketh, G. Barna, H.G. Hughes.".
- 97190680 type "text".