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- 97190838 contributor B8200460.
- 97190838 contributor B8200461.
- 97190838 contributor B8200462.
- 97190838 created "c1997.".
- 97190838 date "1997".
- 97190838 date "c1997.".
- 97190838 dateCopyrighted "c1997.".
- 97190838 description "Includes bibliographical references and index.".
- 97190838 extent "ix, 275 p. :".
- 97190838 identifier "1566771722".
- 97190838 isPartOf "Proceedings (Electrochemical Society) ; v. 96-22.".
- 97190838 isPartOf "Proceedings / Electrochemical Society ; v. 96-22".
- 97190838 issued "1997".
- 97190838 issued "c1997.".
- 97190838 language "eng".
- 97190838 publisher "Pennington, NJ : Electrochemical Society,".
- 97190838 subject "621.381 21".
- 97190838 subject "Chemical mechanical planarization Congresses.".
- 97190838 subject "Grinding and polishing Congresses.".
- 97190838 subject "Metals Pickling Congresses.".
- 97190838 subject "Microelectronics Materials Congresses.".
- 97190838 subject "Semiconductors Surfaces Congresses.".
- 97190838 subject "TK7871 .I585 1996".
- 97190838 title "Proceedings of the First International Symposium on Chemical Mechanical Planarization / editors, I. Ali, S. Raghavan.".
- 97190838 type "text".