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- 97197231 alternative "Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II".
- 97197231 contributor B8207492.
- 97197231 contributor B8207493.
- 97197231 contributor B8207494.
- 97197231 contributor B8207495.
- 97197231 created "c1997.".
- 97197231 date "1997".
- 97197231 date "c1997.".
- 97197231 dateCopyrighted "c1997.".
- 97197231 description "Includes bibliographic references and indexes.".
- 97197231 extent "x, 517 p. :".
- 97197231 identifier "1566771757".
- 97197231 isPartOf "Proceedings (Electrochemical Society) ; v. 97-22.".
- 97197231 isPartOf "Proceedings ; v. 97-22".
- 97197231 issued "1997".
- 97197231 issued "c1997.".
- 97197231 language "eng".
- 97197231 publisher "Pennington, NJ : Electrochemical Society,".
- 97197231 subject "621.39/5 21".
- 97197231 subject "Contamination (Technology) Congresses.".
- 97197231 subject "Crystals Defects Congresses.".
- 97197231 subject "Integrated circuits Very large scale integration Congresses.".
- 97197231 subject "TK7874.75 .S96 1997".
- 97197231 title "Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II / editors, Bernd O. Kolbesen ... [et al.] ; Electronics Division [of the Electrochemical Society].".
- 97197231 title "Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II".
- 97197231 type "text".