Matches in Library of Congress for { <http://lccn.loc.gov/98004222> ?p ?o. }
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- 98004222 contributor B8321283.
- 98004222 contributor B8321284.
- 98004222 created "c1998.".
- 98004222 date "1998".
- 98004222 date "c1998.".
- 98004222 dateCopyrighted "c1998.".
- 98004222 description "Includes bibliographical references and index.".
- 98004222 extent "v, 327 p. :".
- 98004222 identifier "0824799518 (alk. paper)".
- 98004222 identifier 98004222-d.html.
- 98004222 issued "1998".
- 98004222 issued "c1998.".
- 98004222 language "eng".
- 98004222 publisher "New York : Marcel Dekker,".
- 98004222 subject "621.3815/2 21".
- 98004222 subject "Manufacturing processes.".
- 98004222 subject "Microlithography Industrial applications.".
- 98004222 subject "Photoresists.".
- 98004222 subject "Semiconductors Design and construction.".
- 98004222 subject "TK7871.85 .N66 1998".
- 98004222 title "Microlithography fundamentals in semiconductor devices and fabrication technology / Saburo Nonogaki, Takumi Ueno, Toshio Ito.".
- 98004222 type "text".